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(From Telecom World Wire)
Lam Research Corporation (NASDAQ: LRCX), a supplier of semiconductor wafer fabrication equipment and services, stated yesterday (3 March) that Robert Bosch GmbH, a manufacturer of MEMS (micro-electromechanical systems) sensor, specifically automotive sensors and consumer devices, has selected Lam's TCP 9400DSiE deep silicon etch system.
Lam's TCP 9400 silicon etch series, the TCP 9400DSiE system, is based on …