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Tokyo Electron (TEL) Grants SemiCon Precision Industries, Inc. License to Use Patented Spray Technology.
DALLAS -- SemiCon Precision Industries, Inc. today announced that it has licensed the patented Y2O3 (yttrium) coating technology from TEL (Tokyo Electron) for delivery to U.S.-based customers using equipment not manufactured by TEL in the semiconductor industry. The ceramic coating extends process-chamber life while minimizing particulates.
The ability of the yttria coating to reduce cost-of-ownership while improving device yields provides a significant competitive advantage for critical process applications, the two companies said. SemiCon Precision, a privately held firm based in Dallas with operations in Massachusetts, and California, has an established position with key customers in North America.
"This productivity-enabling coating developed by Tokyo Electron is widely accepted throughout the industry as a key advancement in process chamber technology. By licensing the patented Y2O3 coating process to SemiCon Precision, device manufacturers will now have a new source for critical etch chamber components for non-TEL equipment," remarked Mike Grant, vice president of Tokyo Electron America's Etch Systems business unit.
"SemiCon Precision is pleased to announce this relationship with TEL and is confident the relationship will provide semiconductor customers with an alternative process chamber coating that will improve their production rates and yields. Application of this plasma coating will greatly improve the performance of plasma ...
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