JAPAN'S ADTEC'S SYSTEM DETECTS PRINTED PATTERN DISTORTION.
Publication: AsiaPulse News
Publication Date: 30-MAY-03
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TOKYO, May 30 Asia Pulse - Adtec Engineering Co., a maker of photolithography systems used in the printing of circuit patterns on semiconductor substrates, has developed an exposure system that can adjust magnification in the X and Y directions independently. During the chip manufacturing process, substrates are subjected to...
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