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More Orders for Lithography System.
Lambda Physik, a majority owned subsidiary of Coherent, Inc. (5100 Patrick Henry Dr., Santa Clara, CA 95056; Tel: 408/764-4000) and a leading supplier of laser technology, announced that it has received new orders for its NovaLine A4020 and NovaLine F2020 lasers from Silicon Valley Group.
Dirk Basting, founder and president of Lambda Physik comments, "The orders demonstrate Lamda Physik's technological leadership, customer focus, and ability to deliver products required to meet the aggressive growth and stringent demands of the semiconductor industry."
This sale demonstrates the importance of 193-nm technology for semiconductor manufacturing and shows both companies are committed to forwarding the evolution of this technology. The NovaLine A4020 is an Argon-Fluoride, 193-nm laser operating at a 4-kHz repetition rate with an output power of 40 w. The laser provides a partially narrowed beam specifically designed for SVG Lithography System's MS193 high-NA, high-throughput scanner. The increase to 4 kHz enables customers to take full advantage of scanner improvements and maximize wafer throughput.
The production of 193-nm technology requires advanced, reliable, ...
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