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Mass Flow Controllers on Coating Systems.
MKS Instruments, Inc. (Six Shattuck Rd., Andover, MA 01810; Tel: 978/975-2350, Fax: 978/975-0093), a leading supplier of gas flow control products in the thin- film and semiconductor industries, said that Balzers Process Systems (BPS, Liechtenstein) has chosen MKS mass flow controllers (MFCs) for its Sprinter Series of sputtering systems. BPS has chosen to standardize on the MKS model 1179 MFC, which features digital control and Profibus communication electronics, for its MiniDisc sputtering systems. BPS will also use the Model 1170 MFC in its future CD/DVD rewriteable sputtering systems.
BPS is a leading manufacturer of thin-film deposition equipment. The Sprinter Series is engineered for the deposition of thin films for optical storage media. The Sprinter 750 MiniDisc sputtering system is a vertical single-disk sputtering system that incorporates a new automated fast disk transfer system for horizontal loading and unloading.
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