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Micronic Laser Systems (P.O. Box 3141, Taby, Sweden; Tel: 46-8-63852-90) said it had received a strategic order for a MP80 pattern generator from a Japanese merchant mask shop. The company also received an order for an Omega 6000 series pattern generator from a Japanese semiconductor device maker. Delivery of both orders will take place in the second half of this year.
The Micronic MP80 combines the three most important properties of a multi- purpose pattern generator for photomask production - leading edge quality; high throughput; and flexibility for different substrates, processes, and applications. It ...