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PROCESSING: Generator Orders from Japan.

Microtechnology News

| March 01, 2000 | COPYRIGHT 2000 BCC Research. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan.  All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)Copyright

Micronic Laser Systems (P.O. Box 3141, Taby, Sweden; Tel: 46-8-63852-90) said it had received a strategic order for a MP80 pattern generator from a Japanese merchant mask shop. The company also received an order for an Omega 6000 series pattern generator from a Japanese semiconductor device maker. Delivery of both orders will take place in the second half of this year.

The Micronic MP80 combines the three most important properties of a multi- purpose pattern generator for photomask production - leading edge quality; high throughput; and flexibility for different substrates, processes, and applications. It ...

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