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The ninth in a series of workshops on the science and technology of solid state sensors, actuators and microsystems will be held June 4-8, 2000, at the Crowne Plaza Resort on Hilton Head Island, South Carolina. The workshop provides a highly interactive forum for North and South American researchers to present and discuss recent advances in microfabrication technologies for sensing and actuation devices, and microsystems for physical, chemical, and biological applications. Topics include: new sensor, actuator, and microsystems concepts, device and process modeling/design, device fabrication including all aspects of microfabrication, materials and methods of processing, circuits for sensors and actuators, systems applications and issues including data analysis, and packaging technologies for interfacing sensors and actuators to the application environment.
The workshop will be a single-session meeting, with ample time allotted for discussion of each ...