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TEST AND MEASUREMENTB : Product Measures Transparent Films.(Brief Article)
Rudolph Technologies Inc. (RTI, One Rudolph Rd., Flanders, NJ 07836; Tel: 973/691-1300, Fax: 973/691-5480) announced an order from Eaton Semiconductor for its Caliber 300, which measures transparent films on 300-mm wafers. The tool will be used to qualify Eaton's photostabilization, photoresist ashing, and post-ash residue removal tools for 300-mm pre-pilot as well as pilot line production.
The Caliber 300 is an automated film thickness measurement system for 12-in. wafers featuring Laser Spectroscopic Ellipsometry technology and a class 0.01- integrated mini-environment. The proprietary ellipsometry technology incorporates data from multiple ...
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