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TEST AND MEASUREMENTB : Product Measures Transparent Films.(Brief Article)

Microtechnology News

| February 01, 2000 | COPYRIGHT 2000 BCC Research. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan.  All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)Copyright

Rudolph Technologies Inc. (RTI, One Rudolph Rd., Flanders, NJ 07836; Tel: 973/691-1300, Fax: 973/691-5480) announced an order from Eaton Semiconductor for its Caliber 300, which measures transparent films on 300-mm wafers. The tool will be used to qualify Eaton's photostabilization, photoresist ashing, and post-ash residue removal tools for 300-mm pre-pilot as well as pilot line production.

The Caliber 300 is an automated film thickness measurement system for 12-in. wafers featuring Laser Spectroscopic Ellipsometry technology and a class 0.01- integrated mini-environment. The proprietary ellipsometry technology incorporates data from multiple ...

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