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Real-Time Thin-Film Thickness Monitors.(Brief Article)
Ion Optics (411 Waverly Oaks Rd., Waltham, MA 02452; Tel: 781/788-8777) has won a Phase II Small Business Technology Transfer Program (STTR) award from the National Science Foundation (NSF) to develop a simple in situ film thickness monitor which can replace quartz crystal oscillators and other, more complex, instruments. This process is done in collaboration with Ted Morse, professor at the Boston University Photonics Center and Lasertron, (a division of Oak Industries, soon to be part of Corning Inc.), a leading manufacturer of near- infrared (NIR) lasers for fiber-optic communications.
Thin-film deposition is an important step in the fabrication of every advanced optoelectronics or photonic device. Improved understanding of the film's structure, surface roughness, refractive index, defect density, and composition directly leads to lower costs, improved quality, and faster production rates. In fact, prototype testing in Lasertrons's electron beam evaporation process showed that real-time monitoring would improve the yields and double production throughput of their near infrared (NIR) laser diodes. Further improvements to the thin-film monitor ...
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...BUSINESS WIRE)--June 12, 2003 Ion Optics, Inc. today announced the closing of...next 60 days. Chris Mather, CEO of Ion Optics, stated. "This round of funding will...medical and automotive markets." "Ion Optics' opportunities are very exciting...
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...BUSINESS WIRE)--March 2, 2004 Ion Optics, Inc, and Innovative Micro Technology...that they are working together to bring Ion Optics' SensorChip products into production...residential and automotive sensors. Ion Optics' also has opportunities to apply wavelength...
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...PRNewswire/ -- FRT presents a new optical film thickness measuring tool at this year's Laser...in Munich (visit: http://www.film-thickness.com/). The new MicroSpy FT non...spectrum of light. The easy to use film thickness measuring tool is cost-effective...
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...processes is also driving inexpensive film-thickness measurement for every-wafer sampling...presently served by both stand-alone film-thickness tools and integrated metrology. Recent...Industry dynamics are challenging film-thickness metrology beyond this simple stand...
