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Micromachined Servo Accelerometer.(Brief Article)

Microtechnology News

| February 01, 2000 | COPYRIGHT 2000 BCC Research. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan.  All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)Copyright

Endevco Corp. (30700 Rancho Viejo Rd., San Juan Capistrano, CA 92675; Tel: 949/493-8181, Fax: 949/661-7231; Website: endevco.com) is marketing the model MSA100 Servo Accelerometer that utilizes a force rebalanced sensor that offers exceptional ruggedness, high resolution, and low vibration rectification. Temperature output and calibration coefficients are standard features that permit modeling for 3-mg accuracies. This product is designed for inertial motion studies in vehicles, tactical grade missiles, flight tests, and tilt/angle measurements.

The basis of the MSA100 is a three-layer micromachined silicon sensor. The proof mass is in the middle layer and, with applied acceleration, is ...

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