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PUBLICATIONS: Nontechnical Intro to MEMS Technology.(Brief Article)
Artech House (685 Canton St., Norwood, MA 02062) announced the release of An Introduction to Microelectromechanical Systems Engineering, the first nontechnical introduction to the exciting field of MEMS. It describes in detail the materials used in producing MEMS - including silicon, polymers, and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves, and other applications. It examines the manufacture of commercial MEMS using techniques such as oxidation, lithography, chemical vapor deposition, and silicon fusion bonding, and applications in a wide range of industries, including data storage, telecommunications consumer, automotive, medical and defense.
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