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Lam Gets $60 Million Multisystem Order.(Brief Article)
Lam Research (Fremont, CA) announced a multisystem order exceeding $60 from STMicroelectronics headquartered in St. Genis, France. This order represents a significant capacity buy for STMicroelectronics' existing R2 eight-inch fab. It also includes a technology buy for the company's newest fab, Rousset 2000. All of the etch section at Rousset's fab is Lam equipment. Shipments began in September and should continue through April 2000.
The order includes high-density TCP 9400PTX poly- and TCP 9600TX metal-etch systems, 4520XLE dielectric-etch systems, and Synergy post-CMP clean systems. STMicroelectronics intends to manufacture 0.2-micron flash memory, 0.18-micron logic, and 0.25-micron system-on-a-chip - merging logic and flash memory devices at the two fabs.
According to Giuseppe ...
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