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PROCESSING: Increased Production of Lithography Excimer Lasers.

Microtechnology News

| January 01, 2000 | COPYRIGHT 2000 BCC Research. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan.  All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)Copyright

Lambda Physik, a majority-owned subsidiary of Coherent Inc. (5100 Patrick Henry Dr., Santa Clara, CA 5056; Tel: 408/764-4000) is ramping up production of its NovaLine K2010 lithography excimer lasers. With outstanding performance, an aggressive cost of ownership, high uptime, and a flexible support plan, NovaLine litho lasers have demonstrated their ability to meet the stringent demands of the semiconductor industry. The first multiple unit orders for a fab environment have been received, and more are expected from major IC manufacturers. Shipments of the first production orders have already begun.

The NovaLine K2010 is a Krypton-Fluoride, 248-nm laser operating at a 2-kHz repetition rate with an output power of 20 w. The laser provides an ultra-narrow linewidth of less than 0.6 pm, and is combined with a high-NA, high-throughput scanner.

After shipping the world's first fully line-narrowed ...

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