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Lambda Physik, a majority-owned subsidiary of Coherent Inc. (5100 Patrick Henry Dr., Santa Clara, CA 5056; Tel: 408/764-4000) is ramping up production of its NovaLine K2010 lithography excimer lasers. With outstanding performance, an aggressive cost of ownership, high uptime, and a flexible support plan, NovaLine litho lasers have demonstrated their ability to meet the stringent demands of the semiconductor industry. The first multiple unit orders for a fab environment have been received, and more are expected from major IC manufacturers. Shipments of the first production orders have already begun.
The NovaLine K2010 is a Krypton-Fluoride, 248-nm laser operating at a 2-kHz repetition rate with an output power of 20 w. The laser provides an ultra-narrow linewidth of less than 0.6 pm, and is combined with a high-NA, high-throughput scanner.
After shipping the world's first fully line-narrowed ...