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This motion system consists of XY stage utilizing air bearings plus ball screw-driven Z table. Able to be completely customized, X/Y stages offer 600 x 600 mm travel, 10 micron positional accuracy, [+ or -]1 micron positioning repeatability, as well as 1 micron straightness and flatness. Typical Z stage performance includes 25-200 mm travel, position accuracy of 10 microns, and repeatability of [+ or -]1 micron. Position feedback is accomplished via incremental linear encoder with 50 nm resolution.
BURLINGTON, MA --Steinmeyer, Inc. announced a new precision, multi- axis air bearing gantry system. This motion system consists of an XY stage …