AccessMyLibrary provides FREE access to over 30 million articles from top publications available through your library.
Create a link to this page
Copy and paste this link tag into your Web page or blog:
Development of a production EUV source.
Laser Produced Plasma (LPP) EUV source technology has advanced towards the specifications needed for actual chip production.
The clear leader for high-power production EUV sources is laser-produced plasma (LPP) technology. After investigating alternatives, UP has been Cymer's chosen technology path for the last four years. This source architecture provides key advantages of both high conversion and collection efficiency with intrinsic scalability of output power.
Source power and lifetime have been top issues for EUVL development in lithography industry surveys for the past three years. This is because the high throughput needed to provide competitive ...
- Dust collection efficiency analysis in a two-dimensional circulating granular...
- Magazine article from: Journal of the Air & Waste Management Association Bai, Jing-Cheng Wu, Shu-Yii Lee, An-Sheng May 1, 2006 700+ words
ABSTRACT Dust collection efficiency data were analyzed to determine...filter (CGBF). The dust collection efficiency in the granular bed was...showed that higher dust collection efficiency occurs when the solids...
- UHBVN achieves 8.48 pc increase in collection efficiency.
- News wire article from: PTI - The Press Trust of India Ltd. February 25, 2008 700+ words
...achieves 8.48 pc increase in collection efficiency Chandigarh, Feb 25 (PTI) Uttar...achieved 8.48 per cent increase in collection efficiency and 6.63 per cent reduction in...UHBVN said here today that the collection efficiency has gone up to 92.24 per cent...
- Sceptor's Upgraded OMNI 3000(TM) Air Sampler Delivers 30 Better Collection...
- Press release article from: Business Wire May 2, 2006 700+ words
...glass contactor that increases collection efficiency in the crucial 0.5 to 1.0um...the OMNI 3000 delivered nearly 65 collection efficiency in the 0.5 to 1.0um range...Boulder has confirmed the higher collection efficiency of the new design. Using a filter...
- COLLECTION EFFICIENCY OF PHILIPPINES' AKELCO IMPROVES 98 PCT.
- News wire article from: AsiaPulse News April 2, 2003 700+ words
...s better performing electric cooperatives after its collection efficiency improved to 98 per cent only in a year's time, increasing...stopped over in Boracay Island. "With an improved collection efficiency, Akelco has been able to meet its financial obligations...
- Silicon drift detector increases collection efficiency.(Materials Research...
- Magazine article from: Laboratory Equipment November 1, 2007 700+ words
...size and position, which is similar to that of a 10-mm2 silicon lithium Si(Li) detector, result in a collection efficiency of more than 3x that of the Si(Li) detector. The advanced SDD chip enables X-ray maps to be collected...
- Electrostatic enhancement of collection efficiency of the fibrous filter...
- Journal of the Air & Waste Management Association Yang, Shinhao Lee, Grace W.M. May 1, 2005 700+ words
ABSTRACT A study of the electrostatic enhancement of collection efficiency of filters pretreated with ionic surfactants has been carried out in controlled conditions with monodisperse aerosols. Cationic...
- Silicon drift detector increases collection efficiency.(PRODUCT NEWS)
- Magazine article from: Laboratory Equipment February 1, 2007 700+ words
...size and position, which is similar to that of a 10-mm2 silicon lithium Si(Li) detector, result in a collection efficiency of more than 3x that of the Si(Li) detector. The advanced SDD chip enables X-ray maps to be collected...
- A compact fluegas scrubber with high collection efficiency for...
- Magazine article from: Chemical Engineering Ondrey, Gerald April 1, 2004 700+ words
A new fluegas scrubber with up to 99% (mass) collection efficiency for solid and liquid particles--even for submicrometer sized particles--released in industrial fluegas has been developed...
