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The region inside a minienvironment is highly sensitive to air flow. Flow dynamics are governed not only by the parameters of the enclosure but also by those of the enclosed tool. Thus, blanket parameters for velocity, pressure, and flow patterns that are suitable with one particular enclosure configuration may not apply when a different tool is involved. An individual tool's geometry, surface configuration, movements, particle generation characteristics, heat output, etc., have a major effect on air flow patterns and must be accounted for in the design scheme. Successful enclosure designs must also account for requirements placed on temperature, humidity, toxic vapor ...