Solid State Technology articles from March 2003

Solid State Technology archives from March 2003

Chemicals.(suppliers of electronic chemicals)(Directory)
March 1, 2003... Chemicals Acids Air Products Electronic Chemicals 760-930-0273 www.airproducts.com/apec * Ashland Specialty Chemical Co 614-790-4558 www.ashchem.com/ec.html GEM Microelectronic Materials LLC ...

Gases / Gas Handling.(suppliers of commodity gases)(Directory)
March 1, 2003... Gases, Commodity Argon Air Liquide America Corp LP 972-301-5200 www.airliquide.com * BOC Edwards 978-658-5410 www.bocedwards.com * Praxair Electronics 972-479-8614 www.praxair.com/semiconductor ...

Process Materials.(suppliers of process materials)(Directory)
March 1, 2003... Crystals, Growing/Sawing Crucibles, crystal growing Pyromatics Corp 440-951-3985 www.pyrornatics.com Super Conductor Materials Inc 845-368-0240 www.scm-inc.com Crystal growth Cleveland Crystals ...

FSI international. (Advertisement: Corporate Profile).
March 1, 2003... About FSI International We are a global supplier of semiconductor processing equipment and technology that enable microelectronics manufacturers to produce some of world's fastest and most powerful chips. Nearly 30 years of broad industry...

Protecting and transporting critical materials. (Corporate Profile).(profile of Entegris)(Brief Article)(Company Profile)
March 1, 2003... As the leader in materials integrity management for the semiconductor industry for the past 36 years, Entegris protects and transports the critical material inventories of the semiconductor and microelectronics industry. This global...

Silicon Delivery[TM] systems and services. (Corporate Profile).(Entegris)(Brief Article)(Company Profile)
March 1, 2003... Entegris is the only company that customers can turn to for outsourcing their entire wafer and device programs. Its broad product offering, global infrastructure and extensive industry knowledge make it the place to go for complete Silicon...

Trusted brands of fluid handling components. (Corporate Profile).(from Entegris)(Brief Article)
March 1, 2003... A complete line of Entegris fluid handling components manages the materials integrity of the ultrapure and corrosive chemicals used within the industry. The broad product offering includes the industry's most trusted brands of chemical...

Contamination Control.(suppliers of contamination control products and other products to the semiconductor industry)(Directory)
March 1, 2003... Abatement System Chemicals * BOC Edwards 978-658-5410 www.bocedwards.com (see ad p23) Gases ATMI Inc 203-794-1100 www.atmi.com * BOC Edwards 978-658-5410 www.bocedwards.com (see ad...

Fabricated/Process Technology.(makers of software and equipment for the semiconductor industry)(Directory)
March 1, 2003... Process Control, CAD/CAE, Software Computer integrated manufacturing process/control (CIMPAC) Brooks-PRI Automation Inc 978-262-2400 www.brooks-pri.com Dynatronix 715-268-8118 www.dynatronix.com *ECI...

Machinery, Tools & Equipment.(suppliers of equipment to semiconductor industry)(Directory)
March 1, 2003... Automatic Production Machinery & Equipment, Accessories Adhesive/sealant dispensing equipment Asymtek/Nordson 760-431-1919 www.asymtek.com Polytron Inc 215-355-0400 Assembly, components and hybrids Datacon...

Vacuum Technology.(suppliers of vacuum technology and other technology and products to the semiconductor industry)(Directory)
March 1, 2003... Vacuum Systems/Accessories Bell jars and fixtures * BOC Edwards 978-658-5410 www.bocedwards.com CHA Industries 510-683-8554 www.chaindustries.com * CVD Equipment Corp 631-981-7081 ...

Displays.(providers of products to the displays industry)(Directory)
March 1, 2003... Manufacturing Machinery/Equipment/Accessories Backlighting for display panels Aglient Technologies Inc 408-654-8675 www.agilent.com/semiconductors Lumex Inc 847-359-2790 www.lumex.com Carriers, quartz *...

Test, Measurement & Diagnostics.(equipment producers)(Directory)
March 1, 2003... Analyzers Air Biotest Diagnostics Corp 973-625-1300 www.biotestusa.com Dionex Corp 408-737-0700 www.dionex.com E Vernon Hill Inc 707-747-5577 www.evhill.com Molecular Analytics Inc ...

Back End Production.(providers of products to the semiconductor industry)(Directory)
March 1, 2003... Bonding/Die Attach Adhesives, die attach Ablestik 310-764-4600 www.ablestik.com Epoxy Technology Inc 978-667-3805 Thermoset, Lord Chemical Products 317-259-4161 www.thermoset.com Transene Co Inc...

Industry Services.(providers of services to the semiconductor industry)(Directory)
March 1, 2003... Analytical Services Chemical analysis * Ashland Specialty Chemical Co 614-790-4558 www.ashchem.com/ec.html IC Laboratories 914-962-2477 iclabs.com McCrone Associates Inc 630-887-7100 ...

Manufacturing Representatives.(suppliers of chemicals and other products to the semiconductor industry)(Directory)
March 1, 2003... Chemicals. Waste water management Sternel Engineers 49-911-446-9517 www.ib-sternel.de Gases Handling/storage/distribution systems Mark West (EISENMANN) 815-356-2914 www.eisenmann.com Contamination...

Consultants.(providers of consulting services to semiconductor industry)(Directory)
March 1, 2003... Areas of Concentration Chemicals F&F ASSOCIATES 781-444-5499 Spectrum Technologies 800-358-7509 www.consultstonline.com Cleanrooms, design/construction Frank Hubach Associates Inc 510-528-1505 ...

Trade Names. (A-Z).(trade names of products supplied to semiconductor industry)(Directory)
March 1, 2003... A ALEG -- Photoresist strippers, residue removers J T Baker ASQ -- Angle slotted quartz boats ASQ Technology Inc ASTeX[R] -- Power supplies, reactive gas & ozone generators MKS Instruments Inc Antares -- Advanced...

Manufacturers Directory. (A-B).(suppliers of products to semiconductor industry)(Directory)
March 1, 2003... A Biederman Inc 1425 Grand Central Ave, Glendale, CA 91201-2429 818-246-8431 FAX: 818-244-2189 E-Mail: abiederman.com URL: www.abiederman.com VP Oper, Larry Walker; Sr VP Sls, Bill Reis; Emp: 90, 1933 Distributes...

Manufacturers Directory. (C-E).(Directory)
March 1, 2003... Cabot Microelectronics Corp 870 Commons Dr, Aurora, IL 60504 630-375-6631 FAX: 630-499-2666 URL: www.cabotcmp.com Pres/CEO, Mathhew Neville; VP/CFO, Martin Ellen; VP New Bus, Jeremy Jones; VP Oper, Dan Pike; VP HR, J....

Manufacturers Directory. (F-J).(Directory)
March 1, 2003... F&K Delvotec Bondtechnlk GmbH Daimlerstr 5, 85521 Ottobrunn, Germany 49-89-62995-120 FAX: 49-89-62995-101 URL: www.fkdelvotec.com Pres, Farhad Farassat; VP, Said Kazemi; Sls/Mktg Mgr Int'l, Desmond Bradley; Mfg Mgr,...

Manufacturers Directory. (K-M).(suppliers of products to the semiconductor industry)(Directory)
March 1, 2003... K-O Concepts Inc 21 N Texas Ave, Suite A, Orlando, FL 32805; 407-296-7788, FAX: 407-296-4696, E-Mail: sales@k-oconcepts.com, URL: www.k-oconcepts.com CEO, Randel W. Owen; Pres, C. Leon Chandler; VP, Lenita M. Traver; Emp: 5, 1995 ...

Manufacturers Directory. (N-Q).(suppliers of products to the semiconductor industry)(Directory)
March 1, 2003... n&k Technology Inc 4051 Burton Dr. Santa Clara, CA 95054 408-982-0840 FAX: 408-982-0252 Pres/Ceo, Rahim Forouhi; Exec VP, iris Bloomer Emp: 36, 1992 Manufactures analyzers that simultaneously and nondestructively...

Manufacturers Directory. (R-S).(suppliers of products to the semiconductor industry)(Directory)
March 1, 2003... R C Electronics Inc 6464 Hollister Ave Santa Barbara, CA 93117 805-685-7770 FAX: 805-685-5853 E-Mail: info@rcelectronics.com URL: www.rcelectronics.com VP Sis, Jay Giles; Shelly Mazeau; Emp: 35,1981 ...

Manufacturers Directory. (T-Z).(suppliers of products used by the semiconductor industry)(Directory)
March 1, 2003... Taber Industries 455 Bryant St, N Tonawanda, NY 14120 716-694-4000 FAX: 716-694-1450 E-Mail: daube_b@taberindustries.com URL: www.taberindustries.com Pres, Ken L. Slawson; Sr VP, Bernie W. Daube; Emp: 70, 1950 ...

Industry Services Directory. (A-W).(suppliers of services to semiconductor industry)(Directory)
March 1, 2003... Accu-Tech Laser Processing Inc 1175 Linda Vista Or, San Marcos, CA 92069 760-744-6692 FAX: 760-744-4963 E-Mail: sales@accutechlaser.com URL: www.accutechlaser.com Pres, James Byrum; Emp: 28, 1976 Offers multichip...

Manufacturers' Representatives Directory. (A-W).(suppliers to semiconductor industry)(Directory)
March 1, 2003... Advanced Research Systems Inc 905 Harrison St, Allentown, PA 18103 610-439-8022 FAX: 610-439-1184 E-Mail: ars@arscryo.com Emp: 14 Designs and manufactures the Pneumatic drive DISPLEX closed cycle and the ultra low...

Consultants Directory. (A-W).(consultants to semiconductor industry)(Directory)
March 1, 2003... Al Shultz Advertising 1777 Lafayette St, Suite 202, Santa Clara, CA 95050 408-557-0600 FAX: 408-557-0633 E-Mail: al@shultz.com URL: www.alshultz.com Pres/Creative Dir, Al Shultz; Emp: 1983 Specializes in the...

The impact of cyber-business. (Editorial).(Editorial)
March 1, 2003... It is widely believed that the Web will change our world in ways that so far are hard to predict. History has shown that dramatic changes occur in society not just as a result of inventions such as the printing press, telephone, and television,...

December chip sales dip, equipment sales rise. (Business Trends).(Brief Article)
March 1, 2003... Global chip sales reached $12.5 billion in December, a 2.3% drop from the $12.8 billion in revenue reported in November, according to the Semiconductor Industry Association (SIA), San Jose, CA. During the year's final quarter, revenue rose...

Worldwide highlights. (World News).(semiconductor industry news)
March 1, 2003... VLSI Research predicts that chip revenues will increase 22% in 2003, while chip equipment revenues will grow 11.7%. The equipment industry recorded total revenues of $29.9 billion in 2002, which was less than half of 2000's peak. As...

Is total single wafer the fundamental change the industry needs? (Technology News).(Trecenti Technologies is bringing proprietary advantage back to semiconductor manufacturers)
March 1, 2003... Pieter "Pete" Burggraaf On the worldwide list of 300mm fabs, Trecenti Technologies, Hitachinaka, Japan, may seem like just another advanced foundry. However, it is fundamentally different from other 300mm fabs. Trecenti was conceived as a...

International Sematech: Upgraded 200mm technology saves money. (Technology News).
March 1, 2003... Pieter "Pete" Burggraaf There could be a significant market for l3Onm, and even 9Onm, 200mm tools because revamping 200mm fabs will have a significant cost advantage over new 300mm facilities for some products for some time. And...

Motorola researchers hone AFM for nanotubes. (Technology News).
March 1, 2003... Pieter "Pete" Burggraat Using atomic force microscopy (AFM), Arizona-based researchers made a significant advance in the ability to electrically test single or small bundles of electronic molecules for nanotechnology circuitry. This is the...

Extending the life of planar CMOS with multigate CMOS devices. (Front End of Line).
March 1, 2003... As the industry continues to scale devices to meet the various system-on-a-chip (SoC) applications in the future, several types of transistor designs from planar to vertical single-gate (SG), double-gate (DG), and multigate (MG) are emerging as...

Finally! Implementation of low-k (<3) intermetal dielectrics. (Interconnect).
March 1, 2003... In 1993, two-thirds of the leading experts in IC intermetal dielectrics (IMD) expected that IMDs with k The reasons that low-k dielectrics have been so slow (and expensive) to implement have more to do with deficiencies in the materials...

Stresses and opportunity behind today's advanced-IC package proliferation. (Test/Assembly/Packaging).
March 1, 2003... Pieter "Pete" Burggraaf After reading through a recent barrage of new package-design announcements, I queried a few experts about package proliferation and the kinds of engineering and process capability challenges, perhaps stresses, that...

A viable solution: In situ processing for each. (ETCH).(progress in in situ processing is being driven by device design complexity)
March 1, 2003... OVERVIEW In situ etch processing, where multiple operations are performed in a single chamber without interruption, was previously dismissed by some as impractical. Now, with technologies in place that facilitate implementation and a rare...

Using TXRF to monitor phosphorus cross contamination in implanters. (Contamination Control).(TXRF is a fast, nondestructive measurement technique)
March 1, 2003... OVERVIEW It is not uncommon in wafer fabs to use one ion implanter for sequentially implanting multiple elements. This is effective, however, only if the potential for cross contamination is painstakingly controlled and monitored,...

A new generation of CVS monitors Cu damascene plating baths. (Chemicals/Chemical Handling).
March 1, 2003... OVERVIEW With damascene processing gaining acceptance in high-volume IC manufacturing, reliable analysis of copper plating baths is increasingly important. Cyclic voltammetric stripping has shown that it is an accurate and precise method for...

A novel method to prepare wafers with very low COPs for bonded SOI. (Materials).
March 1, 2003... OVERVIEW The adoption of silicon-on-insulator (SOI) wafers is clearly part of the future of advanced semiconductor manufacturing, particularly in extending planar CMOS technology beyond sub-50nm gates. Yet, today the cost of SOI wafers is...

300mm wafer bonding system. (Semicon Europa 2003: Preview).(Brief Article)
March 1, 2003... The GEMINI system provides a fully automated production wafer bonder to the advanced packaging as well as MEMS (200mm bridge tool) production markets. It automatically aligns and bonds wafers up to 300mm and integrates essential process steps...

Furnaces for ALCVD applications. (Semicon Europa 2003: Preview).(Brief Article)
March 1, 2003... The new A4ALD family of the Advance 400 Series furnaces are dedicated to 150, 200 and 300mm batch ALCVD applications. The new furnaces are suited for ALCVD processing of up to 100 wafers in a batch. The furnaces have a high-throughput...

Drying technology for wet process systems. (Semicon Europa 2003: Preview).(Brief Article)
March 1, 2003... AeroSonic drying technology for 200mm and 300mm wafers can be integrated into wet process systems or used as a stand-alone dryer. AeroSonic technology dries high-aspect-ratio structures and fragile substrates without breakage while eliminating...

High-vacuum transducer. (Semicon Europa 2003: Preview).(Brief Article)
March 1, 2003... The HPS Series 909 mini ion transducer is an integrated hot cathode sensor and electronics control package. The 909 is a good measurement tool for high-vacuum applications, including pressure measurement of high-vacuum chambers and control or...

Deep oxide etching ICP tool. (Semicon Europa 2003: Preview).(Brief Article)
March 1, 2003... After the introduction of the "I-Speeder" AMS 200 SE (silicon etcher), its ultrahigh etch rate tool, this company now offers the AMS 200 DE (dielectric etcher), a best-adapted hardware and process solution to meet the typical etch requirements...

Specialty valves and control products. (Semicon Europa 2003: Preview).(Brief Article)
March 1, 2003... Dymatrix specialty valves and control products provide high-performance solutions for CMP processes and ultrapure water and chemical applications. PV Series pinch valves provide cycle life of more than 2 million cycles, eliminating stress and...

Process and thin-film "know-how" when sputtering for passive devices. (Deposition).
March 1, 2003... OVERVIEW One part of successful wafer-level packaging is the need for integrating passive components with IC fabrication, rather than fabricating them separately for integration during conventional assembly and packaging. Wafer processing...

Minimizing As/B autodoping in a CVD epi process. (European Technology).
March 1, 2003... OVERVIEW The autodoping behavior of arsenic and boron in an epitaxial layer is strongly dependent on epitaxial process conditions. It is shown that autodoping could be minimized for both elements simultaneously by using low temperature...

Laser pattern generator. (Product News).(Brief Article)
March 1, 2003... The Sigma7300 laser pattern generator's resolution and pattern accuracy are targeted to volume production at the 9Onm and 65nm technology nodes. The Sigma7300 offers the resolution, pattern accuracy, fidelity and tuning capability to allow...

Dicing system using laser cutter. (Product News).(Brief Article)
March 1, 2003... The LDS 200 series laser dicing system is a laser cutter that applies the water jet guided laser technique, especially adapted to cutting wafers. It can be used for chip dicing, edge grinding, hole drilling, slotting, grooving, inking,...

Laser flip-chip placement. (Product News).(Brief Article)
March 1, 2003... This advanced laser flip-chip placement machine, LAPLACE, provides good process flexibility and enables flipchip placement, solder reflow with underfill, or NCP/ACF curing all in one step. Laser heating also makes a fluxless assembly process...

300mm process coater/developer. (Product News).(Brief Article)
March 1, 2003... CLEAN TRACK LITHIUS is a state-of-the-art system that targets stable production at the 7Onm technology node. It is capable of 150 wph throughput. LITHIUS offers flexible oneblock and two-block configurations, depending on customer processing...

1-8 axis motion controller. (Product News).(Brief Article)
March 1, 2003... The SPii PCI can support up to eight axes of combined servo and stepper control and provide a constant 10KHz update for both the profile generator and controller, regardless of the number of axes supported. The controller communicates with the...

Equipment automation solution. (Product News).(Brief Article)
March 1, 2003... iAutomate combines and leverages the flexibility of STATIONworks, this company's automation development toolkit, with the knowledge and experience obtained through numerous implementation projects. iAutomate is a complete equipment automation...

Ultra-precision gantry. (Product News).
March 1, 2003... The Ultra Precision Gantry incorporates airbearing technology to permit virtually frictionless motion and dynamic performance. The systems feature a massive granite base and rigid steel risers to create a highly stable platform. A magnetically...

Sputtering targets. (Product News).
March 1, 2003... Sputtering targets are available in 62 different metals and alloys, as well as compounds such as borides, carbides, fluorides, nitrides, oxides, selenides, silicides, sulphides, and tellurides. In addition, the surfaces of flat sheets up to 80...

Aerosol particle counting. (Product News).
March 1, 2003... Particle Measuring Systems presents the LASAIR 11-110, a full-featured monitor for aerosol particle counting. As the first monitor to use a thermally chilled, solid state diode laser to count 0.1[micro]m particles, it offers unequalled...

Cu removers. (Product News).
March 1, 2003... The CLk line of Cu removers, for bulk resist, ash/etch residues, and copper contamination, are specifically designed to solve the problems posed by the use of copper interconnects and sensitive low-k dielectrics, including porous low-k CLk-888...

Scanning electron microscope. (Product News).
March 1, 2003... The JSM-6060 PC-SEM features a magnification range of 5-300,000x, resolution of 3.5nm at 30kv, a fully eucentric goniometer stage for specimens up to 32mm in diameter and 50mm in height, and simple operation with easy-to-use graphic interface....

Film inspection, MRAM, optical flatness systems. (Product News).
March 1, 2003... The Film Inspection Tool offers good defect detection capability on a wide variety of film types, including dielectrics and metals. The tool provides accurate defect discrimination that allows the user to reduce the cost of test wafers and...

Direct-drive rotary tables for 300mm. (Product News).
March 1, 2003... Designed for the next generation of die attach, flip chip, and advanced packaging SMT assembly equipment, RotoRing tables feature large 14-in.-diameter, center opening to allow access to every die on 300mm wafers. Unlimited table rotation...

High-resistivity silicon for RF-IC and MEMS. (Product News).
March 1, 2003... HiRes silicon is a new substrate for microwave and millimeter wave applications. HiRes wafers can replace existing RE wafer substrates without compromising important parameters and make "one chip" solutions possible. Radio Frequency (RE)...

High-temperature fluid pumps. (Product News).
March 1, 2003... MPH Series pumps are engineered for low-flow, high-head, high-temperature applications. These close-coupled, sealless, magnetically driven pumps provide cost-effective and efficient fluid handling at temperatures up to 536[degrees]F with no...

Compact, diode pumped laser. (Product News).
March 1, 2003... The newly developed DC Series of air-cooled, diode pumped, harmonic solid-state Q-switched lasers offer a compact, "hands-free" system with long-term reliability. The DC Series was designed to address low-power applications in the infrared...

SST editors ask industry execs about advanced process control. (Perspectives).
March 1, 2003... Recently, Solid State Technology asked several key industry executives: How do you perceive advanced process control (APC) developing (and being funded) in wafer fabs? At AMD, where APC is already a key element in manufacturing, APC...